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VDL (E3.1) 10/2020 Page 47/196
3.5.3 Area classification in the surroundings of the chamber: extraction lead to the
pump, location of the pump
VDL
Pump module
with pump
(example)
front
rear
Pump
(example)
VDL
(rear)
Figure 9: Area classification in the surroundings of the chamber during operation (example)
Occurrence of an explosive atmosphere:
Occasionally: interior of VDL, line to the vacuum pump, pump
On a rare and temporary basis: surroundings of VDL and pump, interior of the pump module
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